The Best-Selling Lithography Books of All Time

Vintage lithography book.

This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop­ erties of) a material into a device whose component dimensions are submicron, called photolithography.

In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit.

The invention in the late eighteenth century of lithography, or "writing on stone," reshaped the course of graphic arts. Some years later, the father of this world-changing technology, Alois Senefelder, published a description of the process. This English translation of the original German work, Vollständiges Lehrbuch der Steindruckerey, vividly describes Senefelder's struggles to develop and popularize the medium and the lithographic techniques employed in the process.

The work is divided into two parts: the first presents a history of the invention and its different processes; the second provides practical instructions for its application—the varieties of stone, ink, instruments, paper, and presses used for different tasks, and the pitfalls to be avoided in working with these materials. An essential reference for graphic artists and students, the classic 1819 treatise remains the definitive work on this topic.